Resnik, M. V. Mezhennyi JSC Giredmet, the Federal State Research and Design Institute of Rare Metal Industry, 5, Build. 1, B. Tolmachevski per., Moscow, 119017, Russia E-mail: labr7@giredmet.ru Features of defect generation in CZT wafers before and after heat treatment were analyzed using methods of transmission electron microscopy. <...> It was shown that during wafers annealing corresponding to epitaxial structure production conditions there were not marked changes in density and average dimension of as grown precipitates which can be divided into three dimensional groups. <...> Small nanoprecipitates (1.5—3.0 nm) correspond to areas which coherent conjugate with CZT matrix and save sequence of lattice atomic planes. <...> Установлено, что в процессе проведения отжигов пласпшн, соответствующих режимам получения эпитаксиальных структур, не наблюдается заметного изменения как плотности, так и средних размеров "ростовых" преципитатов, которые можно разбить на три размерные группы.! <...>