High-resolution microscopy investigations of HgCdTe heteroepitaxial structures E. V. Permikina, A. S. Kashuba, A. V. Ljalikov, . <...> D. Korotaev, I. D. Burlakov Orion R&P Association 46/2 Enthusiasts road, Moscow, 111123, Russia E-mail: IDBUR@orion-ir.ru Presented are results of study of the HgCdTe epitaxial layers grown on the GaAs substrates by MBE. <...> The defects of heterostructure surfaces have been obtained such as hillocks, microvoids and V-shaped defects. <...> Hillocks were observed various on a magnitude. icrovoids had facetted. <...> V-shaped defects were completely covered with polycrystalline material. <...>