UDC 621.378.826.535.8 Properties of Titanium Dioxide Thin Films, Fabricated by Gel Methods N. S. Trofimov Department of Applied Physics Peoples’ Friendship University of Russia 6, Miklukho-Maklaya str., Moscow, Russian Federation, 117198 Titanium dioxide films obtained by gel method are investigated. <...> Optical properties of the fabricated films, such as thickness, refractive index and thermo-optic coefficient were studied by the methods of integrated optics which use waveguide propagation of radiation along the film. <...> The parameters of the films fabricated by sol-gel and gel methods were compared. <...> Refractive index of gel films was determined by the resonant angle of the waveguide excitation, calculated using the optical waveguide dispersion equations and amounted to 2.1–2.4. <...> By the reflection and transmission spectra obtained using spectrophotometer, it was found that films produced under cetrain parameters of technological regime have anisotropic properties. <...> It was established that the presence of anisotropy is due to the structure of the film in the form of a linear oligomer. <...> The structure and morphology of the gel films was studied by electron microscopy. <...> It is shown that the resulting films have a porous structure that allows their doping with substances allowing to create elements of integrated optics, such as lasers, amplifiers, etc. <...> Key words and phrases: thin films, titanium dioxide (TiO2), sol-gel and gel process, integrated optics, birefringence. 1. <...> Introduction on titanium dioxide, such as temperature dependence effective refractive index and, in particular to their ability to birefringence. <...> The SBD technique combines rapid substrate rotation and obliqueangle physical vapor deposition (PVD) to create optical coatings that are composed of nanostructured columns which exhibit large birefringence values in the plane of the substrate. <...> In work [1, 2], post-deposition annealing was used to crystallize amorRecently, researchers pay much attention to the optical properties of films based silica composite thin films have a hexagonally ordered pore array nanostructure. <...> Ultraviolet-visible absorption spectra give the evidence that the TiO2 nanocrystals as well as the four-coordinate Ti co-exist in the silica matrix. <...> The semiconductor TiO2 nanocrystals in the silica matrix have an obvious blue shift phenomenon of the absorption edge. <...> Birefringent <...>