UDC 535.51; 621.382 Light-Diode Holoellipsometer with Binary Modulation of Polarization Employing Light Scattering from Uniaxial Bi-Dimension Crystal M. Ali∗, A. P. Kiryanov†, V. I. Kovalev‡, I. V. Kvasha§ ∗ Bauman Moscow State Technical University 2-nd Baumanskaya str., 5, 105050, Moscow, Russia † Scientific and Technological Center for Unique Instrumentation of RAS Butlerova str., 15, 117312, Moscow, Russia ‡ Department of the Kotelnikov Institute of Electronics and Radiotechniques of RAS Fryazino of the Moscow region, Russia § Experimental Physics Department People‘s Friendship University of Russia Miklukho-Muklaya str., 6, 117198, Moscow, Russia A holoellipsometer with binary modulation of polarization employing almost normal light scattering by the sample representing itself an optically uniaxial crystal is presented. <...> The main equations of the holoellipsometry employing normal light scattering method are obtained. <...> Key words and phrases: ellipsometry, light scattering, polarization, uniaxial bi-dimensional crystals. 1. <...> Here, an ever-increasing role is gained by non-destructive optical diagnostics techniques of applied-physics parameters of semiconductor and dielectric materials, films, coatings and interfaces, being formed in multi-stage technological processes [4]. <...> Optical techniques – are first of all, ellipsometry techniques, such as direct, remote, tems, can be efficiently implemented by way of polarization registration of scattered light [6] from optically uniaxial crystal systems under the use of holoellipsometry and its implementation techniques [7]. non-contact and non-destructive techniques, quite fitting to various technological lines and allowing their efficient automatization [5]. <...> Monitoring of anisotropic, in medias res nanometric layers, actual for surface sysholoellipsometer with binary modulation of light polarization employing almost normal light scattering by an uniaxial bi-dimensional crystal 2. <...> Optical diagram and operation of light diode tering by uniaxial bi-dimensional crystal sample with the use of light flux binary modulation is given in Fig. 1. <...> Here LD — light diode; BSi — beam splitter; Pho – photodetector at input; BMP — binary modulator of polarization [8]; M1,2 — plane mirrors in the incident to sample S and reflected from it light fluxes; ACh — reflected flow absorption chamber; C — collimator; Cp — compensator <...>